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UAM6000 Ultrasonic Electronic Coating System for Photoresist and Flux Spraying

Quantity:
SKU: 7122734501
Model: UAM4000,UAM6000

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Product Details

UAM6000 Ultrasonic Electronic Coating System

Product Summary

The UAM6000 ultrasonic spray coating system is designed for high-precision coating in the electronics industry, including photoresist deposition for MEMS wafers, polyimide dielectric layers, and flux spraying for PCB assembly. It delivers uniform thin films from 50 nm to 30 μm with thickness tolerance ±2%. The non-contact, low-pressure atomization prevents damage to fragile substrates and microstructures. The system is designed for Class 100/1000 cleanroom compatibility, with self-cleaning nozzles to ensure reliable operation with high-purity chemicals.

Key Selling Points

Defect Reduction

Deep trench lithography defect rate reduced by 70% in MEMS applications, with chip yield increased by over 12%.

Material Savings

Photoresist consumption cut by 55%, significantly lowering high-value SU-8 chemical costs.

Cleanroom Compatibility

Designed for Class 100/1000 environments with low static and particle generation.

Wide Coating Range

Support ultra-thin 50nm to thick 30μm coatings, with film thickness error controlled within ±2%.

Low Production Waste

Material utilization rate over 70%, reducing waste and cost.

Technical Specifications

ModelUAM6000
Operating Frequency25–180 kHz
Flow Rate0.001–50 mL/min (application dependent)
Droplet Size18–200 μm (frequency dependent)
Film Thickness20 nm–100 μm
Coating UniformityHigh precision, non-clogging atomization
MaterialStainless steel / titanium alloy

Models and Options

The UAM6000 is part of the UAM series. It can be equipped with XYZ three-axis programmable motion, vacuum adsorption fixtures, and various ultrasonic nozzles suitable for low-viscosity photoresists and high-viscosity thick-film materials. Options include automatic loading/unloading and online thickness measurement.

Materials and Structure

The equipment is constructed from stainless steel and titanium alloy and features a sealed clean chamber, self-cleaning anti-clogging nozzle, and a PLC-based control system. The compact design minimizes footprint in cleanrooms.

Applications

  • Photoresist coating for MEMS and semiconductor wafers
  • Polyimide dielectric insulation for chips
  • Precision flux spraying for PCB assembly
  • Conformal coating on 3D microstructures
  • Wafer dicing protective film coating

Customization

Customizable options include specialized substrate fixtures, high-precision motion systems, integration with production lines, and compatibility with specific photoresist or flux chemistries. Our engineers provide process development support.

Case Study

MEMS Acoustic Sensor Chip Manufacturer (South Korea)

Application: Conformal photoresist spraying on MEMS wafers with deep grooves.

Result: Deep trench lithography defect rate reduced by 70%, photoresist consumption reduced by 55%, chip yield increased over 12%.

FAQ

What is the minimum order quantity (MOQ)?

MOQ is 1 unit.

What are the available delivery terms?

We support FOB, CIF, and DDP terms.

How is the equipment accepted before shipment?

We conduct a full performance test at our factory and provide video and test reports for your confirmation before shipment.

What are the payment terms?

We accept 30% T/T deposit upon order confirmation and 70% balance T/T against the copy of Bill of Lading.

Can the UAM6000 handle high-viscosity photoresists?

Yes, the anti-clogging nozzle is compatible with SU-8 thick photoresist and low-viscosity photoresists, with adjustable coating thickness from 10nm to 100μm.

Is it compatible with Class 100 cleanrooms?

Yes, it is designed with a sealed clean chamber and low particle generation.

Does it support automation?

Yes, the UAM6000 can be fully automated and integrated into production lines.

Inquiry Information

For more information or to request a quote, please contact:

Email: market2@cheersonic.com | Phone: +86 133-7254-0303 | WhatsApp: +86 158-6904-9660

Hangzhou Cheersonic Ultrasonics Equipments Co., Limited, No. 11-13, Chuangye Road, Changkou Town, Fuyang District, Hangzhou City, Zhejiang Province, China

Image Filenames and Alt Suggestions

  • Main Image 1: uam6000-spray-coating-electronic.png - Alt: UAM6000 ultrasonic spray coating system for electronic device manufacturing
  • Main Image 2: uam6000-polyimide-coating.png - Alt: UAM6000 polyimide coating process
  • Detail Image 1: uam6000-photoresist-spraying.png - Alt: UAM6000 applying photoresist on semiconductor wafer
  • Detail Image 2: uam6000-pcb-flux-spraying.png - Alt: UAM6000 spraying flux on PCB
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